March 15 |
| 10:00-12:00 |
Meeting with Executive Committees |
| |
March 16 am
|
| 08:00-09:00 |
Registration |
| 08:45-09:00 |
Conference Opening Welcome Address |
| 09:00-09:45 |
Plenary Speaker-Dr. J Georg Bednorz, IBM (Nobel Laureate) |
| 09:45-10:00 |
Coffee Break |
| 10:00-10:30 |
Keynote Speech: DFM – Looking back, looking forward: Lessons from 65nm, Solutions for 45nm, and Challenges for 32nm |
| |
Mr. Srinivas Raghvendra, Synopsis |
| 10:30-11:00 |
Keynote Speech: Materials Challenges in sub-45nm Devices |
| |
Dr. Cynthia Hoover, Praxair |
| 11:00-11:30 |
Keynote Speech: Today's Semiconductor Industrial Structure and Insights of the Future Development Form |
| |
Mr. Sadao Tsuji,Nissin |
| 11:30-12:00 |
Best Student Paper Award Ceremony |
|
|
Room Yuan |
Room Ming |
Room Tang |
Room Han |
Room Song |
March 16pm |
Symposium A. Device and Reliability |
Symposium E. CMP and Post-CMP Cleaning |
Symposium C. Photolithograpy |
Symposium D.FEOL & BEOL Advanced Processing |
Symposium G. Emerging Technology |
March 17am |
Symposium A. Device and Reliability |
Symposium E. CMP and Post-CMP Cleaning |
Symposium C. Photolithograpy |
Symposium D.FEOL & BEOL Advanced Processing |
Symposium G. Emerging Technology |
March 17pm |
Symposium B. Design for Manufacturing (DFM) |
Symposium E. CMP and Post-CMP Cleaning |
Symposium F. Packaging, Assembly and Test |
Symposium D.FEOL & BEOL Advanced Processing |
Symposium G. Emerging Technology |
