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ISTC2006, MARCH 21-13, 2006, SHANGHAI, CHINA
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EXECUTIVE COMMITTEE |
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| Dr.Ming Yang |
Chairman |
IC Spectrum, Co. Ltd. |
| Dr.Tomi Li |
Co-Chair |
Applied Material |
| Dr.Bob Tseng |
Co-Chair , Division Chair |
TSMC |
| Dr.Qingyuan Han |
Co-Chair , Division Chair |
Axcelis Technologies |
| Prof.H Iwai |
Division Chair |
Tokyo Institute of Technology |
| Dr.Tim Turner |
Division Chair |
Chiron Technology PTE Ltd. |
| Dr.Fei Xu |
Division Chair |
GSMC |
| Dr. Simon Chang |
Division Chair |
Texas Instruments |
| Prof. Mitsumasa Koyanagi |
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Tohoku University |
| Prof. Bill Miline |
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Cambridge University |
| Dr. Swami Mathad |
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S/C Tech. Consulting |
| Prof. Jin Goo Park |
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Hanyang University |
| Prof. Juin J. Liou |
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University of Central Florida |
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SESSIONS COMMITTEE |
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Plenary Session |
Chairman |
Dr. Ming Yang |
ECS-Asia Chairman
IC Spectrum Co., Ltd. Chairman & CEO |
Session I |
Advanced processing (FEOL & BEOL) |
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Chairman |
Dr.Qingyuan Han |
Axcelis Technologies, Inc, USA |
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Co-Chairman |
Dr. Sowmya Krishnan |
Ultra Clean Technology, USA |
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Dr. Mike Smayling |
AMAT, USA |
Committee |
Dr. Hanming Wu |
SMIC, China |
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Dr. Wei Chen |
Dow Corning, USA |
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Dr. Yu-Long Jiang |
Fudan University, China |
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Dr. Huey-Chiang Liou |
Intel, USA |
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Session II |
Device and Device Physics and Modeling |
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Chairman |
Prof. H lwai |
Tokyo Institute of Technology |
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Co-Chairman |
Dr. Claeys Cor |
IMEC, Belgium |
Committee |
Dr. Sunil Wickramanayaka |
Anelva Corporation, Japan |
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Dr.Simon Deleonibus |
CEA-LETI, France |
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Dr. Prashant Majhi |
International Sematech, USA |
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Prof.Juin J Liou |
University of Central Florida, USA |
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Dr.Albert Wang |
Illinois Institute of Technology |
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Session III |
Reliability |
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Chairman |
Dr. Tim Turner |
Chiron Technology PTE LTD |
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Committee |
Mr.Summer Tseng |
Semiconductor Manufacturing International Corporation |
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Mr.Andrew Yap |
Chartered Semiconductor |
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Session IV |
Manufacturing Science |
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Chairman |
Dr. Bob Tseng |
Vice President of TSMC operation Shanghai |
Committee |
Mr.H K Lin |
SMIC, China |
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Mr.Tom Fu |
Charter fab 3 director |
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Mr.Phillip Wen |
CSMC Senior director |
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Session V |
Chemical Mechanical Polishing Technology |
Chairman |
Dr. Fei Xu |
GSMC, China |
Co-Chairman |
Dr. David P. Huang
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Seagate Technology LLC, USA |
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Dr. Wei-Chung Yu |
Rohm and Haas Electronic Materials, USA |
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Dr. K.C. Wu |
SMIC, China |
Session VI |
Photolithgraphy |
Chairman |
Dr.Simon Chang |
Texas Instruments,USA |
Co-Chairman |
Prof. ZeWen Liu |
Tsinghua University,China |
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Odd Hung |
SMIC, China |
Committee |
Dr.Wu Qiang |
Shanghai Huahong NEC Electronics Co., Ltd,China |
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Mr.Hooi Soon |
Ellipsiz Ltd, Singapore |
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