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ISTC2005, MARRCH 15-17, 2005, SHANGHAI, CHINA
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EXECUTIVE COMMITTEE |
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| Dr. Ming Yang |
ICRD |
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Prof.Bill Miline |
Cambridge University |
| Dr.Swami Mathad |
S/C Tech.Consulting,USA |
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Prof. H Iwai (Device and Reliabilty Division Chairman) |
Tokyo Institute of Technology |
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Mr. Simon Chang (Photolithography Division Chairman) |
Texas Instruments, USA |
| Dr. Bob Tseng (Maufacturing Science Division Chairman) |
Vice President of TSMC operation Shanghai |
| Dr. Ken MacWilliams (Materials & Equipment Chairman) |
Applied Materials, CTO of Thin film group |
| Dr.Qingyuan Han (Advanced Process Chairman) |
Axcelis Technologies, Inc, USA |
| Dr. Sookap Hahn (CMP Division Chairman) |
SKW Associates,Inc |
| Prof.M.koyanagi |
Tohoku University,Japan |
| Dr.Sunil Wickramanayaka |
Anelva Corporation |
| Prof.Jin Goo Park |
Hanyang University |
Dr.Tomi Li
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AMAT, Senior Director |
Dr. Michael A. Fury
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DuPont EKC Technology,VP R&D and Engineering |
| Dr. Sheldon Wu |
Vice President of TSMC |
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SESSIONS COMMITTEE |
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Session 1 |
Device, Modeling and Reliability Division |
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Chairman |
Prof.H Iwai |
Tokyo Institute of Technology,Japan |
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Committee |
Dr.Claeys Cor |
IMEC,Belgium |
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Dr.Sunil Wickramanayaka |
Anelva Corporation,Japan |
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Dr.Xingong Wan |
ICRD |
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Dr.J. J. Liou |
Univ. of Central Florida |
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Dr.Prashant Majhi |
International Sematech,USA |
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Dr. Albert Wang |
Integrated Electronics Laboratory |
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Session 2 |
Lithography Division |
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Chairman |
Mr.Simon Chang |
Texas Instruments,Inc |
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Committee |
Mrs. Marylyn Bennett |
SEMATCH, US (former SPIE International Symposium Chair) |
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Mr. Alex Cheng |
SMIC, China |
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Dr.Curtis Liang |
GSMC,Shanghai China |
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Dr.Cesar Garza |
Freesca0le |
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Dr.Mukherjee-Roy Moitreyee |
Institute of Microelectronics, Singapore |
Advisory committee: |
Mr.Jun Zhu |
ICRD |
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Dr.Geert Vandenberghe |
IMEC,Belgium |
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Session 3 |
Materials and Equipment Division |
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Chairman |
Dr.Ken MacWilliams |
Applied Materials |
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Committee |
Dr.D.P.Chu |
Cambridge University |
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Dr. Michael A. Fury |
DuPont EKC Technology,VP R&D and Engineering |
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Session 4 |
Advanced Processing Division |
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Chairman |
Dr.Qingyuan Han |
Axcelis Technologies,Inc,USA |
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Co-Chairman |
Dr.Mike D.Armacost |
AMAT |
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Committee |
Dr.Swami Mathad |
S/C Tech.Consulting,USA |
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Prof.Bingzong Li |
Fudan University,China |
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Dr.Wei Chen |
Dow Corning |
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Session 5 |
Manufacturing Science Division |
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Chairman |
Dr. Tseng |
TSMC |
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Committee |
Dr. Laith Altimime |
Kla-Tencor |
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Session 6 |
Chemical Mechanical Polishing Technology Division |
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Chairman |
Dr.Sookap Hahn |
SKW Associates,Inc |
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Committee |
Dr.Wei-yung Hsu |
AMAT |
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Dr.Wei-Chung Yu |
Rohm & Haas Electronic Materials |
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Mr.Jia Chu |
ICRD |
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Dr.Hanming Wu |
SMIC,China |
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